Probe Station
Make: Cascade and Tektronix
Model: EPS 150 TRIAX EDU and 4200
Year of purchase: 2016
Funded by:
Location: Fab Lab
Contact email: fablab@cens.res.in
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  • Substrate Size: 1X1 cm2 to 6-inch diameter wafer.
  • Chuck Details:
  • Triaxial Chuck: ≥ 6-inch diameter
  • Chuck Triaxial cable (Force/Sense)
  • X, Y, Theta stage:
  • Range of movement: Movement of the stage to be at least 15cm X 15cm in the x-y direction
  • Theta travel: 360 degrees
  • Resolution in x-y positioning:< 5 microns
  • Z travel- adjustable up to 10mm and load stroke of up to 3mm
  • Platen: Course and fine platen lift up to 40mm with precise contact /separation stroke of 200 mm with repeatability of <+/- 1mm
  • Vacuum Pump: Suitable vacuum pump compatible to the system along with necessary accessories including vacuum tubing
  • Micropositioners:
  • Magnetic base micropositioners
  • Movement of micropositioners should be 12.5 mm in x-y-z directions
  • Resolution: 2um or better
  • Four micropositioners with 2m Triaxial cable & accessories
  • Stereo Microscope:
  • Eye-piece: min 30x
  • Magnification: Total magnification ≥ 320X
  • Camera: CCD/CMOS high-resolution digital camera with resolution ≥ 3 Megapixel with compatible software & hardware to view and store the picture of the device in the computer.
  • Microscope mount: system compatible microscope mount.
  • Light source: LED / suitable light source and suitable power supply
  • Head with CMOS port.
  • Electrical measurement system
  • Keithley 4200 semiconductor characterization system with two source measure units and one CV unit.
Modes Duration (hrs)
Manual 1 hr
4200 Windows-based software 1 hr
Sl. No. - Category Fees ( in Rs/- ) + additional 18% GST
01 - Academic Institutes 750 per slot / 1.5 hrs
03 - External Industry Users 1,500 per slot / 1.5 hrs
02 - External Industry Partner 1,125 per slot / 1.5 hrs