Thermal Evaporation System
| Make: | VEC Solutions |
| Model: | |
| Year of purchase: | 2016 |
| Funded by: | |
| Location: | Arkavathi |
| Contact email: | fablab@cens.res.in |
| Book New Request | |
- Used to deposit thin films of metals and organic materials
- The source material evaporated in a vacuum
- Backing pump Pressure: 5×10-2 mbar
- Roughing Pressure: 5 ×10-2mbar
- Turbo-molecular pump Pressure in Pennig gauge – 1×10-6mbar
- Quartz crystal is used to monitor the thickness of the deposited film and also to control the rate of evaporation
- Typical filament currents are 10-125mA
- Heating filaments/boats: Tungsten, molybdenum
- Maximum deposition thickness that can be achieved is 600nm.
- Substrate temperature can be increased up to 150oC.
- Used to deposit metals and organic materials
- We can use the hard metals also such as Nickel, but it will take longer time
| Modes | Duration (hrs) |
|---|---|
| Manual | 60-80-minutes |
| Sl. No. - Category | Fees ( in Rs/- ) + additional 18% GST |
|---|---|
| 01 - Academic Institutes | 500 (Cu, Al etc); 800 (Au) / 100 mg |
| 03 - External Industry Users | 1000 (Cu, Al etc); 1600 (Au) / 100mg |
| 02 - External Industry Partner | 750 (Cu, Al etc); 1200 (Au) / 100 mg |