Spectroscopic Ellipsometer
| Make: | J.A. Woolam Co. |
| Model: | Alpha-SE |
| Year of purchase: | 2021 |
| Funded by: | |
| Location: | Micro/Spectroscopy Lab |
| Contact email: | mslab@cens.res.in |
| Book New Request | |
- Angles of Incidence: 65°, 70°, 75° (off sample) 90° (straight through)
- Spectral Range: 380nm to 900nm (180 wavelengths)
- Pixel Resolution: 0.01eV
- Data Acquisition Rate: Fast (3 seconds*) Standard (10 seconds*) Long (30 seconds*) *for complete spectrum
- Beam Diameter: Approximately 3 mm
- Measurable Quantities:-
- -Ellipsometry: Ψ (0°-90°) and Δ (0°-360°)
- -Transmission intensity: %Transmission
- -Reflection intensity: % Reflection
- -Depolarization: % Depolarization
- -Mueller-matrix: Measure and fit 12 normalized elements of the Mueller-matrix. Useful for samples that are both anisotropic and depolarizing.
- -Sample Size: Sample dimensions from 5mm up to 200mm. Maximum substrate thickness = 16mm
- Typical Accuracy:-
- - Straight-through measurement of empty beam:
- - Ψ = 45°± 0.1 tan(Ψ) = 1 ± 0.0035
- - Δ= 0° ± 0.2 cos(Δ) = 1 ± 0.000006
- Typical Repeatability:-
- - Thirty repeated measurements of SiO2 (25nm)/Si at 70° angle and ten second averaging with fixed sample:
- - δthickness = 0.01nm *1-standard deviation
- System Configuration (in order)
- -Light Source
- -Fixed Polarizer
- -Sample
- -Step Scan Rotating Compensator Fixed Analyzer
- -Spectrometer and Detector
- The alpha-SE® is the ideal spectroscopic ellipsometer for fast routine thin film measurements.
| Modes | Duration (hrs) |
|---|---|
| Spectroscopic Ellipsometry | 1 hr |
| Sl. No. - Category | Fees ( in Rs/- ) + additional 18% GST |
|---|---|
| 01 - Academic Institutes | 750 per slot / 2 hrs |
| 03 - External Industry Users | 1,500 per slot / 2 hrs |
| 02 - External Industry Partner | 1,125 per slot / 2 hrs |