Surface Stylus Profilometer
Make: Bruker
Model: DektakXT
Year of purchase: 2021
Funded by:
Location: Micro/Spectroscopy Lab
Contact email:
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  • The primary purpose of the equipment is to measure the film thickness having a “step”. The step height provides the thickness of the deposited films.
  • It should collect accurate step height and surface roughness measurements and should have 3D Mapping functionality.
  • The range of thickness which is to be examined is from nanometer to millimeter with angstrom level vertical resolution.
  • Force ranges for measuring soft materials like polymers to hard materials like silicon and its compounds: Low forces should be of the order of 0.05 mg to 15 mg.
  • Stylus radius: 2 micron (One extra stylus must be provided as spare with 2 micron radius)
  • Stylus exchange and XY stage mounting:
  • Sample size: Between 1 to 100mm and up to 30 mm thickness.
  • Sample X/Y Stage: Motorized 150mm x 150mm or better translation having 1micron XY repeatability.
  • Dedicated vacuum chuck of at least 8 inch for wafer samples.
  • The video microscope allow viewing of sample surface to enable stylus to stay in view during the scan and have a minimum 0.3 to 2 mm vertical FOV
  • Scan length: Scan length is least 50 mm.
  • Step height repeatability: Step height repeatability ~ 5Å or better
  • Data points/scan: minimum of 120,000 or higher.
  • Noise: Less than 1 nm
  • Vertical resolution: 1 Angstrom or lower
  • Vertical measurement range: 1 nm - 1 mm
  • This Profilometer is able to measure the following characteristics of a film:
  • - Step height / film thickness
  • - Surface roughness
  • - 3D mapping of the surface
  • - Stress Measurement for calculating tensile or comprehensive stress on the sample
  • - User-programmable stylus force should be between 1 mg to 15 mg, depending on the hardness of the surface.
  • - The N-Lite+ Low Inertia Sensor (LIS) enables the stylus force to be adjusted down to 0.03 mg for measuring very soft films.
  • - The direct-drive scan stage allows for the generation of large 3D maps or long scans for measuring stress.
Modes Duration (hrs)
3D mapping Minimum: 30 minutes, Maximum: Depending upon sample size and number of samples.
Stress measurement Minimum: 30 minutes, Maximum: Depending upon sample size and number of samples.
Roughness and thickness measurements Minimum-30 minutes;Maximum-Depending upon sample size and number of samples
Sl. No. - Category Fees ( in Rs/- ) + additional 18% GST