Plasma Cleaner
Plasma Cleaner
Make: HENNIKER PLASMA
Model: HPT - 100
Year of purchase: 2019
Funded by:
Location: Arkavathi
Contact email: temlab@cens.res.in
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  • Microprocessor controlled benchtop plasma treatment system for surface activation, cleaning and modification of a wide range materials including polymers, metals, glass and ceramics.
  • • Stainless Steel Vacuum
  • • Chamber Dimension: 100 mm inner Diameter x 280 mm length
  • • Plasma Generator: Minimum 40 KHz with continuously power variable output 0-100W.
  • • Re-entrant style TEM holder adapter
  • • Dual Gas Channels with: Digital Mass Flow Controller.
  • ◦ Resolution: 0.1% of full scale
  • ◦ Repeatability: +/-0.3% of reading Leak rate: <0.1% of full scale
  • • Powered Electrode: Aluminum and Stainless Steel
  • • Microprocessor controlled system
  • • Color touchscreen interface
  • • Gas flow control via mass flow controller
  • • Software store of recipe parameters
  • • Vacuum pump minimum 5m3/hr pumping speed, two stage rotary type. Base pressure <5E-3mbar. Suitable for use with air, oxygen and non-corrosive gases
  • • Pirani vacuum gauge
  • Plasma cleaning
  • Plasma surface activation to improve adhesion
  • Functional plasma coatings
  • Plasma etching
  • PDMS & microfluidic devices
  • PEEK & other engineering polymers
  • PTFE
  • Metals
  • Ceramics
  • Glass & optical devices
Modes Duration (hrs)
Ar-O2 mixture 10 mins
Sl. No. - Category Fees ( in Rs/- ) + additional 18% GST