FESEM/FESEM with EDS
FESEM/FESEM with EDS
Make: TESCAN and Bruker
Model: MIRA 3 ( FESEM) and Quantax 200 (EDS), Evactron XEI (plasma cleaner)
Year of purchase: 2014 (FESEM –EDS), 2016 (Decontaminator)
Funded by:
Location: TEM/SEM Lab
Contact email: semlab@cens.res.in
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  • 2X to 10,00,000X Magnification
  • High vacuum and low vacuum ( up to 500 Pa) imaging
  • IR camera for chamber view
  • Everhart-Thornley type detectors with YAG scintillators
  • Chamber SE detector, Resolution-1.2 nm at 30 kV (SE: Secondary electrons)
  • In-Beam SE detector,Resolution-1.0 nm at 30 kV
  • Pneumatic anti-vibration suspension system
  • Accelerating voltage- 50 V to 30 kV in steps of 10 V
  • Probe current 2 pA to 200 nA
  • Field of view- 6.4 mm at WD 10 mm and 20 mm at WD 30 mm
  • 20 ns to 10 ms per pixel scanning speed (Adjustable continuously)
  • Selectable image frame size up to 8192 X 8192 pixels
  • Point & line scan, image rotation & shift and tilt compensation
  • Sample stage movements : Motorized X,Y,Z = 80 mm, 60 mm, 47 mm respectively
  • Rotation = 360 deg –motorized
  • Tilt = -80o to +80o –motorized
  • Energy Dispersive X-ray Spectrometer (EDS)-having Peltier cooled Silicon drift detector (SDD)
  • Detection from Boron (5) to Americium (95)
  • Maximum input count Rate > 1000 kcps
  • 30 mm2 Active Area
  • Resolution < 129 eV (MnKalpha)
  • ESPRIT Quant-automatic software tools for standard less quantitative spectra analysis
  • Image acquisition from SE source
  • Multi point, line scan and mapping (ultra fast digital elemental mapping with unlimited number of elements), histograms, binary and ternary charts
  • Secondary electron imaging for morphology studies
  • Backscattered electron imaging
  • Low vacuum detector for imaging non conducting materials.
  • Scanning Transmission Electron Microscopy (STEM) at 30 kV with 2 detectors TE bright and TE Dark
  • Beam deceleration mode
  • Decontaminator attachment for plasma cleaning of sample surfaces and chamber
  • EDS quantitative spectra analysis
  • EDS mapping of various elements
Modes Duration (hrs)
EDS 15 min per sample
STEM Usually takes 5 min (It depends on the scan rate)
High Vacuum 1 hour per sample
Low vacuum (LVSTD) 1 hour per sample
Sl. No. - Category Fees ( in Rs/- ) + additional 18% GST
03 - Industry 2000 per sample | 4000 per hour | 1000 for gold coating (1 batch-max. 1 cm2 6 samples)
01 - Other Academia 800 per sample | 1800 per hour | 500 for gold coating (1 batch-max. 1 cm2 6 samples)
02 - Industry partner 1300 per sample | 2800 per hour | 700 for gold coating (1 batch-max. 1 cm2 6 samples)