Spectroscopic Ellipsometer
Spectroscopic Ellipsometer
Make: J.A. Woolam Co.
Model: Alpha-SE
Year of purchase: 2021
Funded by:
Location: Micro/Spectroscopy Lab
Contact email: mslab@cens.res.in
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  • Angles of Incidence: 65°, 70°, 75° (off sample) 90° (straight through)
  • Spectral Range: 380nm to 900nm (180 wavelengths)
  • Pixel Resolution: 0.01eV
  • Data Acquisition Rate: Fast (3 seconds*) Standard (10 seconds*) Long (30 seconds*) *for complete spectrum
  • Beam Diameter: Approximately 3 mm
  • Measurable Quantities:-
  • -Ellipsometry: Ψ (0°-90°) and Δ (0°-360°)
  • -Transmission intensity: %Transmission
  • -Reflection intensity: % Reflection
  • -Depolarization: % Depolarization
  • -Mueller-matrix: Measure and fit 11 normalized elements of the Mueller-matrix. Useful for samples that are both anisotropic and depolarizing.
  • -Sample Size: Sample dimensions from 5mm up to 200mm. Maximum substrate thickness = 16mm
  • Typical Accuracy:-
  • - Straight-through measurement of empty beam:
  • - Ψ = 45°± 0.1 tan(Ψ) = 1 ± 0.0035
  • - Δ= 0° ± 0.2 cos(Δ) = 1 ± 0.000006
  • Typical Repeatability:-
  • - Thirty repeated measurements of SiO2 (25nm)/Si at 70° angle and ten second averaging with fixed sample:
  • - δthickness = 0.01nm *1-standard deviation
  • System Configuration (in order)
  • -Light Source
  • -Fixed Polarizer
  • -Sample
  • -Step Scan Rotating Compensator Fixed Analyzer
  • -Spectrometer and Detector
  • The alpha-SE® is the ideal spectroscopic ellipsometer for fast routine thin film measurements.
Modes Duration (hrs)
Spectroscopic Ellipsometry 1 hr
Sl. No. - Category Fees ( in Rs/- ) + additional 18% GST